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Reactive Sputter Deposition
Sigmund, P.
(Speaker)
Department of Physics, Chemistry and Pharmacy
Activity
:
Talks and presentations
›
Conference presentations
Description
Plenarforedrag: My fifty years with sputtering
Period
8. Dec 2011
→
9. Dec 2011
Event title
Reactive Sputter Deposition
Event type
Conference
Location
Linkoeping, Sweden
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